wafer.space Community

Has anyone looked into making MEMS on the chip? I've seen a few logos and so forth, wondered if anyone had done actual mechanisms? The tricky part, I'd guess, is making parts that deliberately detach from the surface and really honestly won't come loose later.

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I don't see how you would make MEMS. AFAIK this requires specific process steps, not something you can make on a standard CMOS process.

7:41 p.m.

Everything you draw here is encapsulated in SiO2 .. nothing can move.

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@tnt - I wonder if there is something you can do with post processing?

A related question to this, is it possible to somehow make electrochemical sensors with this process? I'm assuming not

@v - The idea with providing the ability to purchase full wafers is to allow people to add further layers on top of the GF180MCU stuff. I added that as it was requested by a bunch of groups but so far nobody seems to have actually used it.

I see, yea it makes sense it probably takes a whole other supply chain and operation to do other sensors

quantum capable process when https://qolab.ai/technology

tnt

I don't see how you would make MEMS. AFAIK this requires specific process steps, not something you can make on a standard CMOS process.

Yeah, you also need to do weird stuff like depositing on top of resist, etching holes, then washing the resist out from underneath. Not typical process steps...

https://science.xyz/foundry seems to offer reasonably easy access to MEMs type stuff.

Science Foundry

Leverage Science Corporation's technologies for your own research and development.